| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical film thickness monitor which is suitable for aerosol deposition (AD method) and is used for on-the-spot measurement, and to provide a coating device that uses the same. SOLUTION: This optical film thickness monitor is used for a coating device, wherein ultrafine-particle brittle materials supplied onto a substrate 49, are loaded with a mechanical impact force to cause the brittle materials to join to each other, and a compact is formed. White light is inputted into the compact from an end face of a measuring probe 410, to measure the reflectance spectra coming from the compact, and the film thickness and reflectance of the compact are derived from the interfering state of the reflectance spectrum, under conditions where the wavelength band of the reflectance spectrum is larger than the particle diameters of the brittle materials. COPYRIGHT: (C)2009,JPO&INPIT
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