| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an aligner for improving temperature stability inside the aligner. <P>SOLUTION: In the alignment system provided with a fluid supplier 100 for supplying fluid through a flow path to the aligner 300, the fluid supplier 100 is provided with a sending means 10, a heat exchanger 20, a chemical filter 30 for removing unwanted substances in the fluid, a first temperature sensor 110 for measuring the temperature of the fluid, and a heater 40 disposed at the downstream of a removal means inside the fluid supplier 100 for adjusting the temperature of the fluid. The aligner 300 is provided with a second temperature sensor 120 for measuring the temperature of the fluid supplied from the fluid supplier 100. The heater 40 adjusts the temperature of the fluid on the basis of the information of the temperature measured by the second temperature sensor 120. <P>COPYRIGHT: (C)2009,JPO&INPIT |
