| 摘要 |
PROBLEM TO BE SOLVED: To enable an ultrasonic horn to apply a vibration in the horizontal direction (lateral vibration) and a vibration in the vertical direction (longitudinal vibration) with respect to a bonding surface while overlapping each other at the same time, or to mainly apply the vibration in the vertical direction (longitudinal vibration), or to freely change the ratio of the vibration components between the vibrations in both the directions, depending the bonding conditions. SOLUTION: The ultrasonic horn is provided with: a rodlike horn 52 having a prescribed length; an ultrasonic transducer 54 fixed to one end of the horn 52 in its longitudinal direction, and for exciting the horn 52 in its longitudinal direction; a pressurization receiving part 58 which is located on a face parallel to the longitudinal direction of the horn 52 and keeps a bonding load applied through a sliding member 96; and a bonding action part 60 which is on a face parallel to the longitudinal direction of the horn 52 and opposed to the forming face of the pressurization receiving part 58, and which is provided at a position other than the position where natural vibration in the longitudinal direction has maximum amplitude, and pressed by a bonding part. COPYRIGHT: (C)2009,JPO&INPIT
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