| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged-particle beam deflection device wherein a charged-particle beam incident from two different directions can be collected into one optical path and a transmission rate of both beams is high and a sector magnet easy for processing is provided. SOLUTION: The double focusing sector magnet 20 having an incident side end face 21 and emitting side end face 22 is provided. An angleαof the incident side end face 21 and an angleβof the emitting side end face 22 are set up to be in the vicinity of a valueα<SB>0</SB>satisfying the condition of dV/dα=0 and a valueβ<SB>0</SB>satisfying the condition of dV/dβ=0 when a distance from the emitting side end face 22 of the sector magnet 20 to a converging point Q of the charged-particle beams 10 is set up to be V. A magnetic field lens 27 for collecting charged-particle beams 40 which go straight is arranged on a back surface of the sector magnet 20. COPYRIGHT: (C)2009,JPO&INPIT
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