| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid droplet ejecting head which can secure a stable displacement characteristic by preventing the occurrence of defects to a piezoelectric element, and to provide its manufacturing method and a liquid droplet ejector. SOLUTION: The liquid droplet ejecting head 10 is equipped with an ink chamber substrate 12 with cavities 12a which communicate with nozzles 11a to eject liquid and are surrounded by diaphragms 12A, an elastic film 13 formed contacting with the cavities 12a and the diaphragms 12A, and the piezoelectric elements 14 comprised of a lower electrode 4 prepared on the elastic film 13, a piezoelectric film 5 and an upper electrode 6. The elastic film 13 is formed into a projecting shape toward the cavity 12a side in a region where the film contacts with the cavity 12a. The projecting shape has a slope at a side surface. COPYRIGHT: (C)2009,JPO&INPIT
|
