发明名称 STRUCTURE FOR PREVENTING PAD PEELING
摘要 A structure for preventing pad peeling includes a semiconductor substrate, a dielectric layer, a pad, and a protective layer. The semiconductor substrate has an active circuit structure. The dielectric layer is disposed on the semiconductor substrate and has an opening located in the dielectric layer above an edge position of the corresponding active circuit structure. Besides, the opening exposes a part of the surface of the active circuit structure. The pad disposed above the semiconductor substrate covers the dielectric layer above the position of the corresponding active circuit structure and fills up the opening. The protective layer is disposed on the dielectric layer and covers the edge of the pad.
申请公布号 US2008303168(A1) 申请公布日期 2008.12.11
申请号 US20080190575 申请日期 2008.08.12
申请人 UNITED MICROELECTRONICS CORP. 发明人 WU PING-CHANG
分类号 H01L23/488 主分类号 H01L23/488
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