| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To reduce differences in inspection sensitivity among a plurality of inspection devices (airframes) due to characteristic variations of components in a system such as a lighting system, an optical system, and to provide a detection system by compensating detection image signals from the detection system. <P>SOLUTION: An inspection device for inspecting a defect or a foreign material on the surface of an object to be inspected by processing a combined image includes: a light source for illuminating light fluxes to the object to be inspected; an optical system for introducing reflected scattered light which is reflected from the object; a photoelectric image sensor in which a plurality of photoelectric cells for converting the reflected scattered light to electric detection signals; a detection signal transmitter having channels which are composed of a signal compensation section, A/D converters, and image formation sections corresponding to each of a plurality of regions to which the photoelectric sensor is divided; and an image combination section that forms the image of the surface of the object by combining partial images output from the detection signal transmitter; in which the detection signal transmitter can compensate so as to bring the detection signals from the photoelectric cells close to the reference target values of reference detection signal intensity values which are defined for each channel. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
