摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing an optical device where peripheral-darkening can be effectively corrected at a low cost, and to provide the optical device. SOLUTION: A first flattened layer 28 is formed on a semiconductor substrate 21, and the surface thereof is flattened, thereafter, a flare prevention film 32 is formed on the surface of the first flattened layer 28, in a position located above a wiring layer 24. A color filter 29 is formed above the first flatted layer 28. In this case, the color filter 29 is formed so as to interpose a gap between the color filter 29 and the flare prevention film 32. The surface of the color filter 29 is flattened by chemical mechanical polishing. Since the gap is formed between the color filter 29 and the flare prevention film 32, the thickness of the peripheral part 34 of the color filter 29 becomes thinner than that of the center part 33. At the final process, microlenses 31 are formed above the color filter 29 through the second flattened layer 30. COPYRIGHT: (C)2009,JPO&INPIT
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