| 摘要 |
PROBLEM TO BE SOLVED: To detect a relative position of a glass substrate side and a metal mask in high accuracy, in a mask alignment device for positioning of the glass substrate and the metal mask in manufacturing an organic EL display. SOLUTION: A coaxial reflection lighting device 22 and a transmission lighting device 31 are provided, respectively, for a mask-side alignment mark 17 and a substrate-side alignment mark 16. From an image taken with the reflection lighting put on and the transmission lighting put off, positions of the substrate-side alignment mark 16 and the mask-side alignment mark 17 are detected to carry out positioning, after which, from an image taken with the transmission lighting put on and the reflection lighting put off, positions of the substrate-side alignment mark 16 and the mask-side alignment mark 17 are detected to carry out positioning. With this, high-accuracy positioning can be performed. COPYRIGHT: (C)2009,JPO&INPIT
|
