| 摘要 |
PROBLEM TO BE SOLVED: To provide an eccentricity amount measuring device capable of specifying the position of a normal image on the images, even when an unwanted image, formed via other surface different from the normal image formed through an inspecting surface, is carried on the images, when the eccentricity amount is measured by applying an autocollimation method. SOLUTION: The eccentricity amount measuring device is equipped with a mount 20 rotatably supporting a lens body 5; a measuring head 10 forming a reticle image on a focal plane, by irradiating light from a light source 11 to a lens surface 52a and forming a reticle image on an imaging plane, by guiding reflected light from the surface 52a to the imaging plane, and forming each image corresponding to each rotational position; and an analysis calculating part 30, analyzing the eccentricity amount based on each image. By finding the difference between each of the images, the analysis calculating part 30 eliminates unnecessary reticle images from the images. COPYRIGHT: (C)2009,JPO&INPIT
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