摘要 |
PROBLEM TO BE SOLVED: To provide a reaction apparatus in which a reactive medium can be reacted stably. SOLUTION: The reaction apparatus is provided with: a substrate 2 having a high temperature part 1a and a low temperature part 1b; a first flow passage 2a by which the high temperature part 1a is made to communicate with the low temperature part 1b and through which the reactive medium is made to flow from the low temperature part 1b to the high temperature part 1a; and a second flow passage 3a which is arranged between the high temperature part 1a and the low temperature part 1b and through which a cooling medium is made to flow. The reactive medium is preferably composed of a plurality of different media to be merged with one another in the low temperature part 1b. COPYRIGHT: (C)2009,JPO&INPIT
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