发明名称 Die Singulation Methods
摘要 Some embodiments include methods in which a front side region of a semiconductor substrate is placed against a surface. While the front side region is against the surface, the semiconductor substrate is thinned, and then cut into a plurality of dice. The surface may be a pliable material, and may be stretched after the cutting to increase separation between at least some of the dice. While the pliable surface is stretched, at least some of the dice may be picked from the surface. In some embodiments, the semiconductor substrate is retained to the surface with a radiation-curable material. The material is in an uncured and tacky form during the thinning of the substrate, and is subsequently cured into a less tacky form prior to the picking of dice from the surface.
申请公布号 US2008305616(A1) 申请公布日期 2008.12.11
申请号 US20070759824 申请日期 2007.06.07
申请人 CLAWSON PAUL 发明人 CLAWSON PAUL
分类号 H01L21/46 主分类号 H01L21/46
代理机构 代理人
主权项
地址