MICROPUMP

摘要

The present invention provides a displacement micropump (1) and a method for manufacturing such. The displacement micropump (1) comprises a pumping chamber (12), an inlet valve (4), an outlet valve (5), and a first flexible diaphragm (14) arranged to be able to vary the volume of the pumping chamber (12), and integrated means for moving the flexible diaphragm (18). The micropump (1) is a multilayer structure having a plurality of layers, wherein at least one layer is a micro structured layer of a metal or a metal alloy such as stainless steel. The plurality of layers comprises a micro structured microfluidic layer (24) which at least partly forms the pumping chamber (12). Preferably paraffin is used for moving the diaphragm. The multilayer structure may be sealed using clamping and/or a conformal coating on the plurality of layers forming an intermediate sealing layer (31).