| 摘要 |
<P>PROBLEM TO BE SOLVED: To allow for easy replacement of a microwave generating means, and improve reliability of mounting of the microwave generating means on the waveguide when the waveguide is used for propagation of a microwave in the plasma generating device used for workpiece treatment or the like such as reforming of a substrate. <P>SOLUTION: By hooking a hook 211 formed on one side to a U-shaped engaging piece 112, and hooking a spring type catch clip 212 mounted on the other side to the hook 113, the microwave generating device 20 composed of a magnetron is detachably mounted on the upper plate 11U of a first waveguide piece 11. Accordingly, replacement (detachment) of the microwave generating device 20 can be carried out easily without using a tool. Moreover, against a stress or the like by temperature, since the microwave generating device 20 is pushed to the upper plate 11U and mounted by a spring force of the spring type catch clip 212, rattling does not occur at the joining part, and the mounting reliability can be improved. <P>COPYRIGHT: (C)2009,JPO&INPIT |
