| 摘要 |
PROBLEM TO BE SOLVED: To provide stable light emission intensity right after the rising of a semiconductor laser when driving the semiconductor laser for oscillation. SOLUTION: A laser beam irradiating apparatus includes a semiconductor laser 1408 which emits laser beam that is irradiated to an object, a Peltier element 1407 thermally coupled to the semiconductor laser, and laser temperature control means (1401 and 1404) for controlling driving of the Peltier element so that the temperature of the semiconductor laser comes to be a target value. The laser temperature control means, during a driving period for oscillating the semiconductor laser, controls the temperature of the semiconductor laser by a feed forward control using the Peltier element during the period from the start of driving of the semiconductor laser till a specified time has passed, and controls the temperature of the semiconductor laser by a servo control using the Peltiel element after the specified time has passed. COPYRIGHT: (C)2009,JPO&INPIT
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