| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a ferroelectric capacitor having improved hysteresis characteristics. SOLUTION: The manufacturing method of a ferroelectric capacitor includes: a process for forming a second plug conductive section 83 at a prescribed position of an interlayer insulating film 7; a process for forming an oxygen barrier film 85 on the interlayer insulating film 7 by covering the second plug conductive section 83; a process for forming an opening 85a at the oxygen barrier film 85; a process for forming a through hole 72 for a third plug for exposing a charge storage section 5 by etching with the oxygen barrier film 85 as a mask; a process for performing annealing treatment in an oxygen atmosphere after forming the through hole 72 for a third plug; and a process for forming a third plug conductive section in the through hole for a third plug after the process for performing annealing treatment. COPYRIGHT: (C)2009,JPO&INPIT
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