| 摘要 |
PROBLEM TO BE SOLVED: To provide an electromagnetic field detection probe observing an electromagnetic field distribution near a printed board, and more particularly to provide an electromagnetic field detection probe having high spatial resolution and a method of manufacturing the same in which an antenna element of a laminated structure is formed using a semiconductor process. SOLUTION: The electromagnetic field detection probe includes a coaxial cable and the antenna element in which an antenna pattern of a prescribed shape is formed of a conductive thin-film on an insulating film. The antenna element is disposed on a tip end face of the coaxial cable, and the coaxial cable and the antenna element are electrically connected. COPYRIGHT: (C)2009,JPO&INPIT
|
