| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device and an inspection method capable of performing a plurality of inspections continuously and accurately with a simple process and a simple constitution. SOLUTION: A table 20 holds a circuit board 24. The tip of the second probe 40 is separated from the circuit board 24 farther than the tip of the first probe 30. The first inspection circuit 14 inspects an electric characteristic of the circuit board 24 through the first probe 30. The second inspection circuit 16 inspects the electric characteristic of the circuit board 24 through the second probe 40. A lifting device 22 moves the table vertically. The second probe 40 is brought into contact with an electrode E in contact with the first probe 30 by pressing the first probe 30 to the electrode E of the circuit board 24 by the lifting device 22. COPYRIGHT: (C)2009,JPO&INPIT
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