发明名称 |
Forming carbon nanotube capacitors |
摘要 |
A capacitor may be formed of carbon nanotubes. Carbon nanotubes, grown on substrates, may be formed in a desired pattern. The pattern may be defined by placing catalyst in appropriate locations for carbon nanotube growth from a substrate. Then, intermeshing arrays of carbon nanotubes may be formed by juxtaposing the carbon nanotubes formed on opposed substrates. In some embodiments, the carbon nanotubes may be covered by a dielectric which may be adhered by functionalizing the carbon nanotubes.
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申请公布号 |
US2008305603(A1) |
申请公布日期 |
2008.12.11 |
申请号 |
US20080228204 |
申请日期 |
2008.08.11 |
申请人 |
MOSLEY LARRY E;MAVEETY JAMES G;PRACK EDWARD R |
发明人 |
MOSLEY LARRY E.;MAVEETY JAMES G.;PRACK EDWARD R. |
分类号 |
H01L21/20;H01L21/31;H01L21/311 |
主分类号 |
H01L21/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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