| 摘要 |
FIELD: chemistry. ^ SUBSTANCE: aggregated crystalline powder-like silicon, having area of "" surface in range from 100 to 700 m2/g, is obtained with continuous supply of at least one vaporous or gaseous silane and optionally at least one vaporous or gaseous alloying substance and inert gas to reactor. Silane fraction is in range from 0.1 and 90 wt % in terms of total amount of silane, alloying substance, inert gas. Reaction is carried out in plasma, formed by supplying energy of electro-magnetic radiation in microwave range at pressure from 10 to 1100 mbar. Reaction mixture is allowed to cool and reaction product is separated from gaseous substances in form of powder and subjected to further chemical processing. ^ EFFECT: nanometric crystalline powder-like silicon with large surface area, which can be alloyed. ^ 22 cl, 3 dwg, 1 tbl, 7 ex |
