发明名称 TRANSFER ROBOT EQUIPMENT
摘要 A contactless type transfer robot equipment is provided to improve work efficiency and prevent particle generation by travelling in contactless manner and thus reducing load due to weight. A contactless type transfer robot equipment comprises a robot hand(110) for loading or unloading a substrate(300); a moving body(120) rotating the robot hand vertically and horizontally; a robot unit(100) for loading or unloading the substrate; and a robot driving part(200) driving a robot unit. A number of arms are connected to rotate onto main axle(126) integrated with a support(124).
申请公布号 KR20080107069(A) 申请公布日期 2008.12.10
申请号 KR20070054929 申请日期 2007.06.05
申请人 LG DISPLAY CO., LTD. 发明人 CHOI, SEUNG HEON;LEE, GEE JO;YEO, YEONG JEON
分类号 B25J5/02;B25J5/00 主分类号 B25J5/02
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