发明名称 DRY ETCH STOP PROCESS FOR ELIMINATING ELECTRICAL SHORTING IN MRAM DEVICE STRUCTURES
摘要 The present invention relates generally to semiconductor fabrication and particularly to fabricating magnetic tunnel junction devices. In particular, this invention relates to a method for using the dielectric layer in tunnel junctions as an etch stop layer to eliminate electrical shorting that can result from the patterning process.
申请公布号 EP1999781(A2) 申请公布日期 2008.12.10
申请号 EP20070753250 申请日期 2007.03.16
申请人 TEGAL CORPORATION 发明人 DITIZIO, ROBERT
分类号 H01L21/00 主分类号 H01L21/00
代理机构 代理人
主权项
地址