| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical disk device capable of seeking at high speed by using an electrostatically driven galvano micro mirror the mirror substrate of which is reduced in weight to decrease the moment of inertia with respect to the galvano micro mirror and the optical disk device using it. SOLUTION: In the galvano micro mirror provided with the mirror substrate 1 having a mirror forming part 5 in which a mirror surface 5a reflecting a light beam is formed, a shaft part 4a which supports the mirror forming part 5, and an electrode forming part 6 which forms an electrode for turning the mirror forming part 5 around the shaft part by electrostatic force, the thickness of the electrode forming part 6 is formed less than the thickness of the mirror forming part 5. |
