首页
产品
黄页
商标
征信
会员服务
注册
登录
全部
|
企业名
|
法人/股东/高管
|
品牌/产品
|
地址
|
经营范围
发明名称
Apparatus for compensating transients heat loads in a lithography mirror
摘要
申请公布号
EP1679537(B1)
申请公布日期
2008.12.10
申请号
EP20060004031
申请日期
2003.06.16
申请人
ASML HOLDING N.V.
发明人
DEL PUERTO, SANTIAGO
分类号
G02B5/08;G02B7/195;G02B7/18;G03F7/20;H01L21/027
主分类号
G02B5/08
代理机构
代理人
主权项
地址
您可能感兴趣的专利
TRAFFIC MATRIX COMPUTING METHOD AND DEVICE BASED ON CLASS OF SERVICE TRAFFIC INFORMATION
OPTIMIZATION OF WEB PAGE CONTENT INCLUDING VIDEO
OLIGOCRYSTALLINE CERAMIC STRUCTURES FOR ENHANCED SHAPE MEMORY AND PSEUDOELASTIC EFFECTS
STABILIZATION AGENTS FOR SILVER NANOWIRE BASED TRANSPARENT CONDUCTIVE FILMS
ELECTRIC VEHICLE SHIFT CONTROL DEVICE
NOVEL HETEROCYCLIC FLUORESCENT DYES AND METHOD OF PRODUCTION THEREOF
PHOTON MODULATION MANAGEMENT SYSTEM
ORGANIC THIN FILM, AND ORGANIC SEMICONDUCTOR DEVICE AND ORGANIC TRANSISTOR USING SAME
MIST NETWORKS
FLUID TURBINE WITH SLIP RING
GEL SEALING CORROSION PREVENTION TAPE
DYE-SENSITIZED SOLAR CELL AND PRODUCTION METHOD THEREFOR
BISMUTH-VANADATE-LAMINATE MANUFACTURING METHOD AND BISMUTH-VANADATE LAMINATE
IMPACT-ABSORBING COMPONENT
TARGETING CD138 IN CANCER
POLYBUTADIENE MODIFIED POLYMER POLYOLS, FOAMS PREPARED FROM POLYBUTADIENE MODIFIED POLYMER POLYOLS, AND PROCESSES FOR THE PRODUCTION THEREOF
COMPOSITE INTERFERENCE SCREWS AND DRIVERS
ENERGY ABSORBING TRUSS STRUCTURES FOR MITIGATION OF INJURIES FROM BLASTS AND IMPACTS
COMMUNICATION SYSTEM, INTEGRATED CONTROLLER, PACKET TRANSFER METHOD AND PROGRAM
REDUCED PROFILE CENTRAL VENOUS ACCESS CATHETER WTIH VENA CAVA FILTER AND METHOD
