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发明名称
Korpuskularstrahl-Bearbeitungseinrichtung
摘要
申请公布号
DE1902668(A1)
申请公布日期
1970.07.30
申请号
DE19691902668
申请日期
1969.01.16
申请人
SIEMENS AG
发明人
MUELLER,DIPL.-ING.KARL-HEINZ
分类号
H01J37/304
主分类号
H01J37/304
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代理人
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