| 摘要 |
A microphone is provided to simplify the system with the microphone without requiring an external power supply by forming a floating thin film in which the charge is injected between a first insulating layer and a second insulating layer. A microphone includes a semiconductor substrate, a lower electrode, a first insulating layer(120), a floating thin film pattern, a second insulating layer, and an upper electrode. The lower electrode is formed in an upper portion of the semiconductor substrate. The first insulating layer is formed on the lower electrode. The floating thin film pattern is formed on the upper portion of the first insulating layer. The charge is injected into the floating thin film pattern. The second insulating layer surrounds the floating thin film pattern. The second insulating layer is formed on the upper portion of the first insulating layer. The upper electrode is floated from the upper portion of the second insulating layer. The first insulating layer is exposed by removing a part of the semiconductor substrate. A hole(151) penetrating the first and second insulating layer is formed on the semiconductor substrate. |
