发明名称 Fabrication of phase change memory element with phase-change electrodes using conformal deposition
摘要 A phase change memory element with phase change electrodes, and method of making the same. Exemplary embodiments include a phase change bridge, including a bottom contact layer, a first insulating layer disposed on the bottom contact layer, a first phase change region disposed on the bottom contact layer adjacent the first insulating layer, a second phase change region disposed on the bottom contact layer adjacent the first insulating layer, wherein the first insulating layer thermally and electrically isolates the first and second phase change regions, and a third phase change region disposed on each of the first and second phase change regions, each of the third phase change regions isolated from one another by a conductor layer disposed on the first insulating layer.
申请公布号 US7462858(B2) 申请公布日期 2008.12.09
申请号 US20070668224 申请日期 2007.01.29
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 BURR GEOFFREY W.
分类号 H01L29/04 主分类号 H01L29/04
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