| 摘要 |
A method of operating a plurality of clean room in a compound within a common enclosure and supplying each room with filtered air by a blower-filter unit by arranging the clean rooms and the blowers connected thereto in two parallel spaced rows with a corridor therebetween, and permitting filtered air to escape the clean rooms from beneath the walls of the clean rooms. Continuous operation of the blowers produces a bubble-like volume of air surrounding the blowers which consists primarily of clean, recirculated air escaping from the clean rooms. By arranging the clean rooms and blowers so that the clean air bubble produced by each blower overlaps the bubbles produced by at least two other blowers, the entire compound can be contained in a highly purified atmosphere consisting primarily of recirculated filtered air. A portion of the air from one or more clean rooms may be discharged in an upward direction through an opening in its top wall.
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