发明名称 |
Simulator of optical intensity distribution, computer implemented method for simulating the optical intensity distribution, method for collecting mask pattern, and computer program product for the simulator |
摘要 |
A simulator of an optical intensity distribution includes a field divider dividing an exposure field on a substrate into a first and second fields, the first field being to be directly exposed to a light incident at the maximum incident angle, the second field being prevented from being directly exposed to the light by a protrusion on the substrate, a first optical intensity calculator calculating an optical intensity of the first field by using a direct incident light component of the light, a second optical intensity calculator calculating an optical intensity of the second field by using a reflected light component of the light reflected from a sidewall of the protrusion, and a projected image simulation engine simulating an optical intensity distribution of a projected image of a mask pattern on the substrate, based on the optical intensities of the first field and the second field.
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申请公布号 |
US7463347(B2) |
申请公布日期 |
2008.12.09 |
申请号 |
US20060389125 |
申请日期 |
2006.03.27 |
申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
SATO TAKASHI;NAKANO AYAKO |
分类号 |
G01B9/00;G03B27/42;G03B27/62;G03F1/36;G03F1/68;G03F1/70;H01L21/027 |
主分类号 |
G01B9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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