发明名称 |
Method of fabricating element having microstructure |
摘要 |
A method of fabricating an element having a microstructure such as an MEMS device uses a material whose state changes with a temperature change. A sheet-like member having a microstructure on its surface is fixed to a vacuum chuck by an adhesive sheet and the material whose state changes with a temperature change is applied to the surface of the sheet-like member the material is then cooled to solidify it on the surface of the sheet-like member and the sheet-like member is cut 10 into a plurality of elements, while the material is in the solidified state, and the separated elements are then removed from the adhesive sheet.
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申请公布号 |
US7462312(B2) |
申请公布日期 |
2008.12.09 |
申请号 |
US20040967234 |
申请日期 |
2004.10.19 |
申请人 |
FUJITSU LIMITED |
发明人 |
MATSUSHITA NAOHISA;FURUI TOSHIKAZU |
分类号 |
B29C37/00;H01L21/301;B81C1/00 |
主分类号 |
B29C37/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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