发明名称 Microelectromechanical component and method for the production thereof
摘要 A microelectromechanical component and to a method for the production thereof is disclosed. In one embodiment, the microelectromechanical component has a pressure-sensitive semiconductor chip, which is covered in its pressure-sensitive region by a rubber-elastic layer and is arranged in a cavity housing and covered by a rubber-elastic covering. This rubber-elastic covering has a greater thickness than the rubber-elastic layer on the pressure-sensitive region.
申请公布号 US7462919(B2) 申请公布日期 2008.12.09
申请号 US20040558114 申请日期 2004.05.24
申请人 INFINEON TECHNOLOGIES AG 发明人 ENGLING THOMAS;PETZ MARTIN
分类号 H01L29/84;B81B7/00 主分类号 H01L29/84
代理机构 代理人
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