| 摘要 |
A twin target sputtering device for uniformly enforcing the electrode deposition of OLED governing the efficiency of the emitting device is provided. A twin target sputtering device for reducing damage in sputtering comprises a chamber including the substrate mounting portion mounting the substrate(13) for the organic light-emitting device; a first target(2a) and a second target(2b) which is faced it puts the predetermined distance it is prepared within the chamber, and the first target and the housing(3) mounted between the second target; a reaction gas introduction portion for introducing the reaction gas within the housing; and a pipe(4) which the reaction gas introduction portion is inserted into the housing and a plurality of gas blowers formed in the pipe into the constant interval.
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