| 摘要 |
The capacitor and manufacturing method thereof are provided to simplify the manufacturing process by forming the upper wiring, and the third electrode and vias together. The capacitor comprises the first electrode(121), the first dielectric layer(130), the second electrode(141), the second dielectric layer(150), the third electrode(181), the first VIA(183), the second via(184), and the upper wiring(182). The first dielectric layer is arranged on the first electrode. The second electrode is arranged on the first dielectric layer. The second dielectric layer is arranged on the second electrode. The third electrode is arranged on the second dielectric layer. The first VIA is connected to the second electrode. The second via is connected to the first electrode. The upper wiring is connected to the second via. The upper side of the third electrode, and the upper side of the upper wiring and upper side of the first VIA are arranged in the same plane.
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