| 摘要 |
The ceramic electrostatic chuck and a method of manufacture thereof is provided to form the insulating layer without the undercoat process by insulating the surface of the metallic material of the electrostatic chuck with the phosphoric acid ceramics compound. The ceramic electrostatic chuck(100) comprises the base material(110), the first insulation layer(120), the electrode layer(130), the second insulation layer(140). The first insulation layer is formed in the upper side of the base material. The electrode layer has the conductivity and is deposited on the first insulation layer. The second insulation layer is formed on the electrode. The first insulation layer is made of the phosphoric acid ceramics compound. The phosphoric acid ceramics compound is the metal phosphate in which the orthophosphoric acid, metaphosphoric acid, the metaphosphoric acid aluminum [Al(PO3)3] or the orthophosphoric acid aluminum [AlPO4], yttriumoxide, silicon carbide, aluminum-nitride are synthesized.
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