Pedestal structure of semiconductor fabrication equipment,申请号KR20030099682-传众专利搜索

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发明名称	Pedestal structure of semiconductor fabrication equipment
摘要
申请公布号	KR100871790(B1)	申请公布日期	2008.12.05
申请号	KR20030099682	申请日期	2003.12.30
申请人		发明人
分类号	H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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