| 摘要 |
An arc evaporation source and a vacuum evaporation system in which evaporation substances emitted from the cathode of vacuum arc discharge can be collected appropriately. The arc evaporation source (100) comprises first and second electrodes (14A, 14B) opposing each other through a gap (G), wherein at least any one of the first and second electrodes (14A, 14B) serves as a cathode and the other electrode of the first and second electrodes (14A, 14B) can collect evaporation substances emitted from the cathode based on vacuum arc discharge generated between the cathode and the anode. ® KIPO & WIPO 2009
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