| 摘要 |
The probe is provided to prevent the tilting of the probe tip and maintain the contact force between the probe tip and the test material and to reduce the vertical height to the probe tip from the base part of probe. The probe for the probe card comprises the base part(111), the probe tip(113) contacting the test material, the lateral support(112) adding the contact force of the test material and probe tip, the vertical support portion(115) connecting the base part and the lateral support, the tilting prevention unit(114) supporting the probe tip, the spacing support(116) connecting the tilting prevention unit and base part. The lateral part and base part of the probe tip are connected as 'L' shape. |
