LITHIUM-CONTAINING TRANSITION METAL OXIDE TARGET, PROCESS FOR PRODUCING THE SAME AND LITHIUM ION THIN-FILM SECONDARY BATTERY

摘要

A lithium-containing transition metal oxide target consisting of a sintered body of lithium-containing transition metal oxide whose crystal system is a hexagonal system, the sintered body having a relative density of 90% or higher and an average crystal grain diameter of 1 to 50 mum; and a lithium-containing transition metal oxide target consisting of a sintered body of lithium-containing transition metal oxide whose crystal system is a hexagonal system, wherein (003) face, (101) face and (104) face intensity ratios obtained by X-ray diffractometry using CuKE rays satisfy the relationships (1) the peak ratio of (101) face to (003) face is in the range of 0.4 to 1.1 and (2) the peak ratio of (101) face to (104) face is 1.0 or higher. There is provided a lithium-containing transition metal oxide target that is most suitable for forming of a thin-film positive electrode for use in a thin-film battery, such as three-dimensional battery or totally solid battery. Further, there are provided a process for producing the same and a relevant lithium ion thin-film secondary battery. It is especially intended to obtain a positive electrode material target that enables obtaining of a thin film excelling in homogeneity. ® KIPO & WIPO 2009