Pretreatment method of substrate of organic EL element and manufacturing method for organic EL element

摘要

The present invention discloses a method for processing a substrate on which transparent electrode made of metal oxide is formed before forming an organic EL element on the transparent electrode. According to the method, the substrate is accommodated in a bake chamber provided with a heater. The substrate is heated while mixed gas of oxygen and nitrogen is introduced into the bake chamber so as to replace the gas in the bake chamber. The mixed gas is introduced into the bake chamber in an amount that is 1/60 or more and 1/15 or less of a whole volume of the bake chamber per minute. According to this method, moisture is removed and an appropriate surface treatment is performed for the transparent electrode of metal oxide at the same time.