发明名称 Process and Device for Cleaning and Etching a Substrate Wi
摘要 A simple process is disclosed for treating substrates having pre-structured zinc oxide layers on rigid or flexible supports. The ZnO is treated with an etching medium then with a cleaning liquid. The treatment with the etching and cleaning liquids is carried out while the substrate is conveyed through a device. The process is technically simple to implement and makes it possible to regularly and homogeneously roughen and texturise ZnO layers of up to 1 m2. The device for treating substrates having pre-structured zinc oxide layers on rigid or flexible supports has for that purpose a first means for treating the substrate with an etching liquid, a second means for treating the substrate with a cleaning liquid, and another means, in particular transport rollers, for conveying the substrate from the first to the second means.
申请公布号 US2008296262(A1) 申请公布日期 2008.12.04
申请号 US20050547869 申请日期 2005.03.31
申请人 MULLER JOACHIM;SCHOPE GUNNAR;SIEKMANN HILDEGARD;RECH BERND;REPMANN TOBIAS;APENZELLER WOLFGANG;SEHRBROCK BRIGITTE 发明人 MULLER JOACHIM;SCHOPE GUNNAR;SIEKMANN HILDEGARD;RECH BERND;REPMANN TOBIAS;APENZELLER WOLFGANG;SEHRBROCK BRIGITTE
分类号 B44C1/22;H01L21/00;H01L21/306;H01L31/00;H01L31/18 主分类号 B44C1/22
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