发明名称 |
SILICON CARBIDE FORMATION BY ALTERNATING PULSES |
摘要 |
A method of forming silicon carbide wherein silicon and carbon precursors are successively pulsed into a reactor in the gas phase. The precursors react to form silicon carbide before reaching the growth surface. A precursor will be preheated in the reaction chamber before reacting with the other precursor. The formed silicon carbide sublime then condenses on a growth surface. |
申请公布号 |
WO2007087589(A3) |
申请公布日期 |
2008.12.04 |
申请号 |
WO2007US61022 |
申请日期 |
2007.01.25 |
申请人 |
CARACAL, INC.;KORDINA, OLOF CLAES ERIK |
发明人 |
KORDINA, OLOF CLAES ERIK |
分类号 |
C30B23/00 |
主分类号 |
C30B23/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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