发明名称 MACHINING DEVICE AND MACHINING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a machining device capable of reproducibly and accurately positioning a nozzle for supplying a cutting fluid to a grinding wheel at the optimum position for machining. SOLUTION: This machining device comprises: the grinding wheel 1 for cutting or grooving a workpiece W at high speed; the nozzle 5 for supplying the cutting fluid L to the grinding wheel 1; a support member 12 for movably and rotatably supporting the nozzle 5; a light source 7 secured to the nozzle 5 and emitting light toward the grinding wheel 1; a light sensor 8 disposed on the opposite side of the light source 7 with respect to the grinding wheel 1 and detecting the light emitted from the light source 7; and a controller 9 for detecting the relative position of the grinding wheel to the nozzle 5 according to the results of the detection by the light sensor 8. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008290241(A) 申请公布日期 2008.12.04
申请号 JP20080193926 申请日期 2008.07.28
申请人 TOSHIBA CORP 发明人 SUDO MASAAKI
分类号 B24B55/02;B23Q11/10;B24B49/12;H01L21/301 主分类号 B24B55/02
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