| 摘要 |
PROBLEM TO BE SOLVED: To provide a workpiece processor capable of holding a plurality of workpieces on the same axis under the state separating the workpieces in the vertical direction having little restrictions such as a mounting space orthogonal to the carrying direction (the horizontal direction) and capable of processing a large number of the workpieces at the same time. SOLUTION: The workpiece processor has a workpiece processing section 10 interiorly housing a lot 13 vertically supporting multiple workpieces W under a separated state and processing the workpieces under the multiple supporting state, a workpiece introducing section 20 connected to the upper or lower section of the workpiece processing section 10 and a workpieces discharging section 30 connected to the lower or upper section of the workpiece processing section 10. Shutter members 23 and 33 interrupting communication with the atmospheric side are fitted to an introducing port 22 and a discharge opening 32 formed to the workpiece introducing section 20 and the workpiece discharging section 30. COPYRIGHT: (C)2009,JPO&INPIT
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