| 摘要 |
PROBLEM TO BE SOLVED: To provide a continuous burning apparatus capable of shortening the length of a heat insulating material in a conveying direction and shortening the length of the apparatus by distributing gas in a direction crossing the conveying direction of a treated object between two adjacent thermal treatment zones, and suppressing thermal interference between the adjacent thermal treatment zones. SOLUTION: Air supply members 1 and air discharge members 2 are arranged in positions facing each other in an orthogonal direction to the conveying direction X of a substrate 100 between the plurality of thermal treatment zones 12 in a furnace 11 of the continuous burning apparatus 10. The gas outside the furnace 11 is discharged from the air supply member 1 to the air discharge member 2, and the gas inside the furnace 11 is discharged to the outside of the furnace 11 by the air discharge member 2, and the gas blocks the adjacent thermal treatment zones 12, and an effect of heat in one thermal treatment zone 12 on the other thermal treatment zone 12 can be effectively suppressed. COPYRIGHT: (C)2009,JPO&INPIT
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