发明名称 FLUID CONTROL APPARATUS
摘要 <p>Provided is a fluid control apparatus wherein assembly efficiency is improved. Joint members (3, 6a) are permitted to abut to each other and connected by a male screw member (18) from the front-rear direction. Between the adjacent joint members (3, 6a), a seal section (20) is arranged substantially at the center on the rectangular abutting surface. The male screw members (18) in the front-rear direction are arranged only at two parts separated 180°, among the four corners of the rectangle. At the four corners of one joint member (3), screw inserting holes (29) and female screws (30) are alternately arranged, and at the four corners of the other joint member (6a), screw inserting holes (29) and female screws (30) are alternately arranged at the positions inverse to those on the joint member (3).</p>
申请公布号 WO2008146778(A1) 申请公布日期 2008.12.04
申请号 WO2008JP59631 申请日期 2008.05.26
申请人 FUJIKIN INCORPORATED;TOKYO ELECTRON LIMITED;NAKATA, TOMOHIRO;SHINOHARA, TSUTOMU;YAMAJI, MICHIO;OKASE, WATARU;MORIYA, SHUJI 发明人 NAKATA, TOMOHIRO;SHINOHARA, TSUTOMU;YAMAJI, MICHIO;OKASE, WATARU;MORIYA, SHUJI
分类号 F16K27/00;C23C16/455;H01L21/02 主分类号 F16K27/00
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