| 摘要 |
A method and an apparatus for protecting the slit sealing member are provided to decrease the exposure of compressibility sealing member to the gases existing within the process chamber. A valve assembly(108) for the process chamber comprises the housing(202), the door, the compressibility sealing member, and the tool. The housing is arranged within the wall and has the opening(204) in which substrate passes and which can be transferred. The door is connected to the wall of the housing in order to selectively seal the opening. If the compressibility sealing member door is at the closed position, the compressibility sealing member is materially compressed in the wall perpendicularity.
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