| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a beam splitter having a relatively flat apodization function over a wide angular range, which is usable in UV photolithography. <P>SOLUTION: The beam splitter is provided with a first fluoride prism and a second fluoride prism. A coating interface is provided between the first and second fluoride prisms, wherein overall Rs*T(p) function of the beam splitter varies no more than ±2.74% in the range of 40° to 50° of incidence. <P>COPYRIGHT: (C)2009,JPO&INPIT |
