CALIBRATION OF ESD TEST SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a method of calibrating transitional behavior of an ESD test system comprising an ESD pulse generator and a tested device to make the ESD test system wider applicable. SOLUTION: Probe needles connected to an ESD pulse generator with conductors and a measuring device for detecting transitional behavior of a tested device by simultaneously obtaining voltage and current waveforms of the tested device as the result of application of pulses have the steps of: (a) applying the ESD test system to a first known system having a known first impedance; (b) applying the ESD test system to a second known system having a known second impedance; and (c) determining calibration data against the transitional behavior of the ESD test system based on the acquired voltage and current considering the first and second impedances. In a preferred embodiment, the waveforms are converted into frequency regions for relationship. COPYRIGHT: (C)2009,JPO&INPIT