| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus for measuring a thickness of a fine porous membrane precisely, which can reduce variations in a membrane thickness measurement. SOLUTION: In the method and the apparatus for measuring the thickness of the fine porous membrane, a measuring terminal is mounted on the fine porous membrane, and then a motion of the terminal is read by using an optical detector, and the read value is converted into the thickness of the membrane. COPYRIGHT: (C)2009,JPO&INPIT
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