MASK MOLD AND MANUFACTURING METHOD THEREOF AND METHOD FOR FORMING LARGE-AREA FINE PATTERN USING THE MASK MOLD

摘要

A mask mold and a manufacturing method, and a large area micro-pattern molding method using the same are provided to apply the fine patterns of nano-scale or complicated three dimensional shapes with the simple method and the cheap cost. A mask mold manufacturing method comprises the following steps: the step for coating the resist onto a plurality of miniature molds in which a mask or a micro-pattern is imprinted(110); the step for imprinting the micro-pattern on the resist by pressurizing a plurality of miniature molds(150); the step for solidifying the resist(160); the step for separating the resist from the plurality of molds(170).